JPH0645965Y2 - ペリクル用容器 - Google Patents
ペリクル用容器Info
- Publication number
- JPH0645965Y2 JPH0645965Y2 JP1988016037U JP1603788U JPH0645965Y2 JP H0645965 Y2 JPH0645965 Y2 JP H0645965Y2 JP 1988016037 U JP1988016037 U JP 1988016037U JP 1603788 U JP1603788 U JP 1603788U JP H0645965 Y2 JPH0645965 Y2 JP H0645965Y2
- Authority
- JP
- Japan
- Prior art keywords
- pellicle
- container
- lid
- container body
- inner bottom
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 229920003002 synthetic resin Polymers 0.000 claims description 12
- 239000000057 synthetic resin Substances 0.000 claims description 12
- 229920005989 resin Polymers 0.000 claims description 6
- 239000011347 resin Substances 0.000 claims description 6
- 239000000428 dust Substances 0.000 description 14
- 239000002202 Polyethylene glycol Substances 0.000 description 2
- 239000002390 adhesive tape Substances 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- ZBCBWPMODOFKDW-UHFFFAOYSA-N diethanolamine Chemical compound OCCNCCO ZBCBWPMODOFKDW-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 229920001223 polyethylene glycol Polymers 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000000020 Nitrocellulose Substances 0.000 description 1
- 229910019142 PO4 Inorganic materials 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- 239000002216 antistatic agent Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229920001220 nitrocellulos Polymers 0.000 description 1
- 239000010452 phosphate Substances 0.000 description 1
- -1 phosphate ester Chemical class 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 150000003242 quaternary ammonium salts Chemical class 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000011179 visual inspection Methods 0.000 description 1
Landscapes
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988016037U JPH0645965Y2 (ja) | 1988-02-09 | 1988-02-09 | ペリクル用容器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988016037U JPH0645965Y2 (ja) | 1988-02-09 | 1988-02-09 | ペリクル用容器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01120148U JPH01120148U (en]) | 1989-08-15 |
| JPH0645965Y2 true JPH0645965Y2 (ja) | 1994-11-24 |
Family
ID=31228617
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988016037U Expired - Lifetime JPH0645965Y2 (ja) | 1988-02-09 | 1988-02-09 | ペリクル用容器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0645965Y2 (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007328226A (ja) * | 2006-06-09 | 2007-12-20 | Shin Etsu Chem Co Ltd | ペリクル収納容器及びその製造方法 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0123138Y2 (en]) * | 1985-09-04 | 1989-07-17 | ||
| JPS62143948U (en]) * | 1986-03-07 | 1987-09-10 | ||
| US4697701A (en) * | 1986-05-30 | 1987-10-06 | Inko Industrial Corporation | Dust free storage container for a membrane assembly such as a pellicle and its method of use |
| JPS63140526U (en]) * | 1987-03-06 | 1988-09-16 |
-
1988
- 1988-02-09 JP JP1988016037U patent/JPH0645965Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01120148U (en]) | 1989-08-15 |
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